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International Society for Industrial Process Tomography

3rd World Congress on Industrial Process Tomography

Towards Miniaturised Electrical Tomography Sensors

Tin Nguang Phua, Liling Sun, Chris Gregory, John Hatfield and Trevor A York


Department of Electrical Engineering & Electronics, UMIST PO Box 88, Manchester, M60 1QD, UK, tay@umist.ac.uk


ABSTRACT


The aim of the work programme is to realise miniature electrical tomography systems. This is motivated by the benefits that are becoming apparent from the application of “macro” tomography systems and the anticipated opportunities that will emerge in the shrinking systems of the future. Previous work using a single detector has established the credibility of detecting the small capacitance changes that are anticipated and this paper describes possibilities for implementing miniature tomographic sensors. Preliminary results are presented for a 500 µm diameter 8 electrode sensor implemented in silicon. Finite element simulations explore the measurements that may be anticipated for a tapered sensor implemented in a ceramic substrate.


Keywords Electrical tomography, miniature sensor, custom silicon

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